LIGA and its Applications

IntroductionI. TechnologiesInnovative exposure techniques for 3-D microfabricationLarge Surface Area TechniquesPTFE photo-fabrication by SR (TIEGA process)Photomask TechnologiesPhotomask ComparisonsGalvanics and Molding Simulating New LIGA ProcessesCommercial Simulation ProgramSimulation Tools for DesignDesign for Assembly and Safe ManufacturingII. ApplicationsMarket Analysis and Commercialization of LIGAOptical MEMS and Polymer OpticsMicromechanicsRF ApplicationsEvolution of the SpectrometerMicrofluidics in BiotechnologyMEMS (actuators)Microfluidics for Biochip ApplicationsUltrasonic TransducersSwiss Luxury Watches Using MEMS ComponentsIII. OutlookExtreme NanostructuringNovel Resist SystemsHard GoldInterferential X-ray LithographyTable-top Synchrotrons for Future Light Sources and their Application in Microfabrication

Volker Saile is the director of the Institute for Microstructure Technology (IMT) at Karlsruhe Technical University, Germany. ((...))

Ulrike Wallrabe is Professor for Microactuators at IMTEK Freiburg, Germany, since 2003. She studied physics at the University of Karlsruhe and went on to obtain her Ph.D. on microturbines and micromotors at the Institute for Microstructure Technology at the Research Centre in Karlsruhe (FZK) in 1992. At IMT, she subsequently dealt with microactuators and their application in medical technology. From 1999 on, she turned to microoptics and developed components for optical metrology, telecommunications and for optical sensors such as fibre connectors, optical switches, distance sensors and spectrometers, generally produced with the LIGA method.

Her research interests include exploration of new actuator materials, actuator fabrication techniques, and combining microactuators and microoptics.

Osamu Tabata is Professor at the Department of Mechanical Engineering at Kyoto University, Japan. He performed industrial research at Toyota Central Research and Development Laboratories in Aichi from 1981 to 1996. He then joined the Department of Mechanical Engineering of Ritsumeikan University in Shiga, Japan, and spent Guest Professorships at IMTEK Freiburg, Germany, and at ETH Zurich, Switzerland. In 2003, Japan. He is currently engaged in the research of micro/nano processes, the LIGA process, MEMS and micro/nano system synthetic engineering (SENS). He was honored with the Science News Award in 1987, Presentation Paper Award in 1992, and received the R&D 100 Award in 1993 and 1998.

Jan G. Korvink holds a Chair for Microsystem Technology at Albert Ludwig University in Freiburg, Germany, where he runs the laboratory for microsystem simulation. Prior to that, he worked at the Physical Electronics Lab of the ETH Zurich, where he built up and led the microsystem modeling effort. MEMS simulation programs that were developed by him and his