CMOS - MEMS

IntroductionFabrication TechnologyMaterial CharacterizationCMOS-based Inertial SensorsCMOS-based Pressure SensorsCMOS-based Acoustic SensorsCMOS-based RF-MEMSCMOS-based Chemical SensorsCMOS-based Biometric SensorsCMOS-bassd Biological SensorsCMOS-based Thermal SensorsCircuit and System IntegrationAssembly and Packaging

Henry Baltes is Professor of Physical Electronics at ETH Zurich since 1988. He is the Director of the Physical Electronics Laboratory active in CMOS-based bioelectronic, chemical, and physical micro and nano sensor systems and a co-founder of the spin-off company SENSIRION. He held visiting appointments at Stanford University, the University of Waterloo, Ritsumeikan University, the University of Bologna, and the University of Freiburg.
Prior to 1988, he held the Henry Marshall Tory Chair at the University of Alberta, where he was Acting President of the Alberta Microelectronics Centre and co-founder and Director of LSI Logic Corporation of Canada. From 1974 to 1982 he worked for Landis & Gyr Zug (now Siemens) Switzerland, where he directed the solid-state device laboratory. He received the D. Sc. degree from ETH Zurich in 1971.
Henry Baltes is a Fellow of the IEEE and a Member of the Swiss Academy of Technical Sciences. He received the European Science Award of the Koerber Foundation, the Wilhelm Exner Medal of the Austrian Trade Association, and honorary doctoral degrees of the University of Waterloo and the Alma Mater Studiorum University of Bologna.
Oliver Brand is an Associate Professor in the School of Electrical and Computer Engineering at the Georgia Institute of Technology, Atlanta, USA. He received his diploma degree in Physics from Technical University Karlsruhe, Germany in 1990, and his Ph.D. degree (Doctor of Natural Sciences) from ETH Zurich, Switzerland in 1994. Between 1995 and 2002, he held research and teaching positions at the Georgia Institute of Technology (1995-1997) and ETH Zurich (1997-2002).
Dr. Brand has co-authored more than 100 publications in scientific journals and conference proceedings and two books. His research interest is in the areas of CMOS-based micro- and nanosystems, MEMS fabrication technologies, and microsystem packaging. Dr. Brand is on the editorial board of Sensors and Materials and has served on the program